Welcome to the Mechanics of Microscale Systems Lab at UCSB! (formerly Microsystems Charaterization Lab)
The focus of Prof. Kimberly Turner's group is in understanding the physics of microscale devices from experimental dynamic motion behavior of the system. We design, model, analyze and experimentally characterize the dynamics of various MEMS devices.
Present research involves understanding the non-linear and parametric dynamics of MEMS devices and in utilizing the unique properties of such dynamics in small scale to implement novel designs for various applications like switches, sensors and filters.
A primary experimental capability of the lab is the laser vibrometer measurement setup which is capable of resolving motion up to ~4nm and a temperature controllable (~80K-300K) vacuum chamber.
Some of our current projects include -
- Lateral Tunneling Accelerometer: Characterization and Controller
- Applications in Parametric Resonance Phenomenon: Characterization and Controller
- Mechanical Loss in Silicon Resonators: Thermo-Elastic Damping & Support Loss
- Mechanical Filters Based on Parametric Resonance
- Biologically Inspired Reversible Adhesive
- A Novel Design for Atomic Force Microscopy
Some of our recent projects include -
- Biological Sensing: Flexural Plate Wave Device
- Low-Cost Intertial Navigation System: Based on High Aspect MEMS Resonator
- AlN Acoustic Resonators: For RF Filter & HF Mass Detection
- Dynamic Friction Modeling for Micro and Nano Systems
Recent publications about Dr. Turner: